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K Werner

Conference paper (1)

Journal article (4)

5 records found

1

Chemical vs. Physical factors in dry etching induced damage in the Si/GexSi1-x system

Journal article (1997) - RG van Veen (author) , MJ Teepen (author) , Emile van der Drift (author) , T Zijlstra (author) , K Werner (author) , A.H. Verbruggen (author) , S Radelaar (author)

Characterisation of an n-type Si/SiGe modulation doped field-effect transistor

Journal article (1997) - VI Kuznetsov (author) , K Werner (author) , S Radelaar (author) , JW Metselaar (author)

Gas Source MBE growth of Si/SiGe device materials

Journal article (1996) - K Werner (author) , A.J. Storm (author) , T Zijlstra (author) , S Radelaar (author) , S Butzke (author) , JWH Maes (author) , M van Rooy (author) , PFA Alkemade (author) , E Algra (author) , MAJ Somers (author) , BGM de Lange (author) , Emile van der Drift (author)

Origin of rippled structures formed during growth of Si on Si(001) with MBE

Journal article (1996) - J van Wingerden (author) , EC van Halen (author) , K Werner (author) , PMLO Scholte (author) , Fokke Tuinstra (author)

Low thermal budget Si epitaxy an overview study of the substrate/epi interface in a number of common epitaxial growth systems

Conference paper (1996) - M Caymax (author) , L Vescan (author) , K Werner (author) , D Bensahel (author) , D Gravestijn (author) , I Szendro (author)