5 records found
1
Characterisation of an n-type Si/SiGe modulation doped field-effect transistor
Chemical vs. Physical factors in dry etching induced damage in the Si/GexSi1-x system
Gas Source MBE growth of Si/SiGe device materials
Low thermal budget Si epitaxy an overview study of the substrate/epi interface in a number of common epitaxial growth systems
Origin of rippled structures formed during growth of Si on Si(001) with MBE