Gas Source MBE growth of Si/SiGe device materials

Journal Article (1996)
Author(s)

K Werner (TU Delft - QN/Fysics of NanoElectronics)

A.J. Storm (TU Delft - QN/Quantum Transport)

S Butzke (External organisation)

JWH Maes (TU Delft - Old organisation TN/TechnischeNatuurkunde voorm)

M van Rooy (External organisation)

Paul F.A. Alkemade (TU Delft - Old - sect Electronic Materials (NS/EM))

E Algra (External organisation)

MAJ Somers (External organisation)

BGM de Lange (TU Delft - QN/Fysics of NanoElectronics)

Emile van der Drift (TU Delft - QN/Kavli Nanolab Delft)

T Zijlstra (TU Delft - QN/Kavli Nanolab Delft)

S Radelaar (TU Delft - OLD Metals Processing, Microstructures and Properties)

Research Group
QN/Fysics of NanoElectronics
More Info
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Publication Year
1996
Research Group
QN/Fysics of NanoElectronics
Volume number
164
Pages (from-to)
223-234

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