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MJ Teepen
1 records found
1
Authored
Chemical vs. Physical factors in dry etching induced damage in the Si/GexSi1-x system
Journal article (1997) -
RG van Veen
,
MJ Teepen
,
E.W.J.M. van der Drift
,
T Zijlstra
,
K Werner
,
A.H. Verbruggen
,
S Radelaar
