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MJ Teepen

Journal article (1)

1 records found

1

Chemical vs. Physical factors in dry etching induced damage in the Si/GexSi1-x system

Journal article (1997) - RG van Veen (author) , MJ Teepen (author) , Emile van der Drift (author) , T Zijlstra (author) , K Werner (author) , A.H. Verbruggen (author) , S Radelaar (author)