Stiction-induced sealing of surface micromachined channels
Journal Article
(2014)
Author(s)
B Morana (TU Delft - Electronic Components, Technology and Materials)
R.H. Poelma (TU Delft - Electronic Components, Technology and Materials)
G. Fiorentino (TU Delft - Electronic Components, Technology and Materials)
J Wei (TU Delft - Electronic Components, Technology and Materials)
Fredrik Creemer (TU Delft - Electronic Components, Technology and Materials)
P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1109/JMEMS.2013.2280535
To reference this document use:
https://resolver.tudelft.nl/uuid:cd7f0b29-8820-439c-9bb1-8ee1c605e644
More Info
expand_more
expand_more
Publication Year
2014
Language
English
Research Group
Electronic Components, Technology and Materials
Bibliographical Note
Published online 23-9-2013@en
Issue number
2
Volume number
23
Pages (from-to)
459-470
No files available
Metadata only record. There are no files for this record.