Ultra-low noise TES bolometer arrays for SAFARI instrument on SPICA
P Khosropanah (SRON–Netherlands Institute for Space Research)
T. Suzuki (Nagoya University)
M. L. Ridder (SRON–Netherlands Institute for Space Research)
R. A. Hijmering (SRON–Netherlands Institute for Space Research)
H. Akamatsu (SRON–Netherlands Institute for Space Research)
L Gottardi (SRON–Netherlands Institute for Space Research)
J. Van Der Kuur (SRON–Netherlands Institute for Space Research)
J. R. Gao (SRON–Netherlands Institute for Space Research, TU Delft - QN/Gao Lab)
B. D. Jackson (SRON–Netherlands Institute for Space Research)
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Abstract
SRON is developing ultra-low noise Transition Edge Sensors (TESs) based on a superconducting Ti/Au bilayer on a suspended SiN island with SiN legs for the SAFARI instrument aboard the SPICA mission. We successfully fabricated TESs with very narrow (0.5-0.7 μm) and thin (0.25 μm) SiN legs on different sizes of SiN islands using deep reactiveion etching process. The pixel size is 840x840 μm2 and there are variety of designs with and without optical absorbers. For TESs without absorbers, we measured electrical NEPs as low as <1x10-19 W/√Hz with response time of 0.3 ms and reached the phonon noise limit. Using TESs with absorbers, we quantified the darkness of our setup and confirmed a photon noise level of 2x10-19 W/√Hz.