We demonstrate multiplexed readout of 43 transition edge sensor (TES) bolometers operating at 90 mK using a frequency division multiplexing (FDM) readout chain with bias frequencies ranging from 1 to 3.5 MHz and a typical frequency spacing of 32 kHz. We improve the previously reported performance of our FDM system by two important steps. First, we replace the coplanar wires with microstrip wires, which minimize the cross talk from mutual inductance. From the measured electrical cross talk (ECT) map, the ECT of all pixels is carrier leakage dominated. Only five pixels show an ECT level higher than 1%. Second, we reduce the thermal response speed of the TES detectors by a factor of 20 by increasing the heat capacity of the TES, which allows us to bias all TES detectors below 50% in transition without oscillations. We compare the current-voltage curves and noise spectra of the TESs measured in single-pixel mode and multiplexing mode. We also compare the noise equivalent power (NEP) and the saturation power of the bolometers in both modes, where 38 pixels show less than 10% difference in NEP and 5% difference in saturation power when measured in the two different modes. The measured noise spectrum is in good agreement with the simulated noise based on measured parameters from an impedance measurement, confirming that our TES is dominated by phonon noise.

We demonstrate multiplexing readout of 60 transition edge sensor (TES) bolometers operating at 90 mK using a frequency division multiplexing readout chain with bias frequencies ranging from 1 to 3.5 MHz and with a typical frequency spacing of 32 kHz. The readout chain starts with a two-stage SQUID amplifier and has a noise level of 9.5 pA/ Hz. We compare current-voltage curves and noise spectra of TESs measured in a single-pixel mode and in a multiplexing mode. We also map the noise equivalent power (NEP) and the saturation power of the bolometers in both modes, where there are 43 pixels that do not show more than 10% difference in NEP and 5% in saturation power when measured in single pixel and multiplex modes. We have read out a TES with an NEP of 0.45 aW/ Hz in the multiplexing-mode, which demonstrates the capability of reading out ultra-low noise TES bolometer arrays for space applications.

We have characterized and mapped the electrical cross talk (ECT) of a frequency division multiplexing (FDM) system with a transition edge sensor (TES) bolometer array, which is intended for space applications. By adding a small modulation at 120 Hz to the AC bias voltage of one bolometer and measuring the cross talk response in the current noise spectra of the others simultaneously, we have for the first time mapped the ECT level of 61 pixels with a nominal frequency spacing of 32 kHz in a 61 × 61 matrix and a carrier frequency ranging from 1 MHz to 4 MHz. We find that about 94% of the pixels show an ECT level of less than 0.4%. Only the adjacent pixels reach this level, and the ECT for the rest of the pixels is less than 0.1%. We also observe higher ECT levels, up to 10%, between some of the pixels, which have bundled long, parallel coplanar wires connecting TES bolometers to inductor-capacitor filters. In this case, the high mutual inductances dominate. To mitigate this source of ECT, the coplanar wires should be replaced by microstrip wires in the array. Our study suggests that an FDM system can have a relatively low ECT level, e.g., around 0.4% if the frequency spacing is 30 kHz. Our results successfully demonstrate a low electrical cross talk for a space FDM technology.

Superconducting transition-edge sensors (TESs) are highly sensitive detectors. Based on the outstanding performance on spectral resolution, the X-ray integral field unit (X-IFU) instrument on-board athena will be equipped with a large array of TES-based microcalorimeters. For optimal performance in terms of the energy resolution, it is essential to limit undesirable nonlinearity effects in the TES detector. Weak-link behavior induced on the TES by superconducting leads is such a nonlinearity effect. We designed and fabricated smart test structures to study the effect of the superconducting leads on the intrinsic transition curve of our TiAu-based TES bilayer. We measured and analyzed the resistance versus temperature transition curves of the test structures. We found relations of long-distance proximity effects with TES length and different lead materials. Based on these results, we can redesign and further optimize our TES-based X-ray detectors.

The SPICA-SAFARI instrument requires extremely sensitive transition edge sensor (TES) arrays with a noise equivalent power of 2×10-19W/Hz and a readout system with an output noise that is dominated by the detector noise. It is essential to ensure the frequency domain multiplexing (FDM) readout system in SAFARI meets the noise requirement. The FDM system in SAFARI consists essentially of LC filters, a superconducting quantum interference device, a room-temperature low-noise amplifier (LNA), and a demultiplexer. Here we present a noise study of the LNA from a laboratory amplifier chain. We found the equivalent current and voltage noise of the LNA to be 5.4pA/Hz and 315pV/Hz, respectively, which are low enough to read out SAFARI’s TES arrays.

We are developing a transition edge sensor (TES) microcalorimeter array based on a Ti/Au superconducting bilayer, as a backup option for the X-IFU instrument on the Athena X-ray observatory. The array is read out by a frequency-division multiplexing readout system using a 1–5 MHz frequency band. Extensive research collaborations between NASA/Goddard and SRON have led to new design rules for microcalorimeters such as low resistivity of the superconductor bilayer, moderately high ohmic resistance of the TES by changing the aspect ratio and no extra metal strips. We have improved our detector fabrication process according to these design principles and produced TES arrays. Although single-pixel characterizations of these arrays are ongoing, the best energy resolution of 2.0 eV for 5.9 keV X-ray has been observed with a 120 × 20 μm² TES with a normal resistance of 150 mΩ, biased at 2.2 MHz frequency. This shows that our Ti/Au TES array has a potential to fulfill the detector requirements of the X-IFU instrument.

We are developing X-ray microcalorimeters as a backup option for the baseline detectors in the X-IFU instrument on board the ATHENA space mission led by ESA and to be launched in the early 2030s. 5 × 5 mixed arrays with TiAu transition-edge sensor (TES), which have different high aspect ratios and thus high resistances, have been designed and fabricated to meet the energy resolution requirement of the X-IFU instrument. Such arrays can also be used to optimize the performance of the frequency domain multiplexing (FDM) readout and lead to the final steps for the fabrication of a large detector array. In this work, we present the experimental results from tens of the devices with an aspect ratio (length-to-width) ranging from 1-to-1 up to 6-to-1, measured in a single-pixel mode with a FDM readout system developed at SRON/VTT. We observed a nominal energy resolution of about 2.5 eV at 5.9 keV at bias frequencies ranging from 1 to 5 MHz. These detectors are proving to be the best TES microcalorimeters ever reported in Europe, intending to meet the requirements of the X-IFU instrument, but also those of other future challenging X-ray space missions, fundamental physics experiments, plasma characterization and material analysis.

The next generation of Far-infrared and X-ray space observatories will require detector arrays with thousands of transition edge sensor (TES) pixel. It is extremely important to have a tool that is able to characterize all the pixels and that can give a clear picture of the performance of the devices. In particular, we refer to those aspects that can affect the global energy resolution of the array: logarithmic resistance sensitivity with respect to temperature and current (α and β parameters, respectively), uniformity of the TESs and the correct understanding of the detector thermal model. Complex impedance measurement of a TES is the only technique that can give all this information at once, but it has been established only for a single pixel under DC bias. We have developed a complex impedance measurement method for TESs that are AC biased since we are using a MHz frequency domain multiplexing (FDM) system to readout an array. The FDM readout demands for some modifications to the complex-impedance technique and extra considerations, e.g. how to modulate a small fraction of the bias carrier frequencies in order to get a proper excitation current through the TESs and how to perform an accurate demodulation and recombination of the output signals. Also, it requires careful calibration to remove the presence of parasitic impedances in the entire readout system. We perform a complete set of AC impedance measurements for different X-ray TES microcalorimeters based on superconducting TiAu bilayers with or without normal metal Au bar structures. We discuss the statistical analysis of the residual between impedance data and fitting model to determine the proper calorimeter thermal model for our detectors. Extracted parameters are used to improve our understanding of the differences and capabilities among the detectors and additionally the quality of the array. Moreover, we use the results to compare the calculated noise spectra with the measured data.

Dilution and adiabatic demagnetization refrigerators based on pulse tube cryocoolers are nowadays used in many low temperature physics experiments, such as atomic force and scanning tunneling microscopy, quantum computing, radiation detectors, and many others. A pulse tube refrigerator greatly simplifies the laboratory activities being a cryogen-free system. The major disadvantage of a pulse tube cooler is the high level of mechanical vibrations at the warm and cold interfaces that could substantially affect the performance of very sensitive cryogenic instruments. In this paper, we describe the performance of a very simple mechanical attenuation system used to eliminate the pulse-tube-induced low frequency noise of the superconducting transition-edge sensors under development for the instruments of the next generation of infra-red and X-ray space observatories.

Transition Edge Sensors are ultra-sensitive superconducting detectors with applications in many areas of research, including astrophysics. The device consists of a superconducting thin film, often with additional normal metal features, held close to its transition temperature and connected to two superconducting leads of a higher transition temperature. There is currently no way to reliably assess the performance of a particular device geometry or material composition without making and testing the device. We have developed a proximity effect model based on the Usadel equations to predict the effects of device geometry and material composition on sensor performance. The model is successful in reproducing I - V curves for two devices currently under study. We use the model to suggest the optimal size and geometry for TESs, considering how small the devices can be made before their performance is compromised. In the future, device modelling prior to manufacture will reduce the need for time-consuming and expensive testing.

SRON is developing X-ray transition edge sensor (TES) calorimeters arrays, as a backup technology for X-IFU instrument on the ATHENA space observatory. These detectors are based on a superconducting TiAu bilayer TES with critical temperature of 100 mK on a 1 μm thick SiN membrane with Au or Au/Bi absorbers. Number of devices have been fabricated and measured using a Frequency Division Multiplexing (FDM) readout system with 1-5 MHz bias frequencies. We measured IV curves, critical temperature, thermal conductance, noise and also X-ray energy resolution at number of selected bias points. So far our best calorimeter shows 3.9 eV X-ray resolution at 6 keV. Here we present a summary of our results and the latest status of development of X-ray calorimeters at SRON.

SRON is developing ultra-low noise Transition Edge Sensors (TESs) based on a superconducting Ti/Au bilayer on a suspended SiN island with SiN legs for the SAFARI instrument aboard the SPICA mission. We successfully fabricated TESs with very narrow (0.5-0.7 μm) and thin (0.25 μm) SiN legs on different sizes of SiN islands using deep reactiveion etching process. The pixel size is 840x840 μm² and there are variety of designs with and without optical absorbers. For TESs without absorbers, we measured electrical NEPs as low as <1x10^-19 W/√Hz with response time of 0.3 ms and reached the phonon noise limit. Using TESs with absorbers, we quantified the darkness of our setup and confirmed a photon noise level of 2x10^-19 W/√Hz.

SRON is developing ultra-low-noise transition edge sensors (TESs) based on a superconducting Ti/Au bilayer on a suspended SiN island with SiN legs for SAFARI aboard SPICA. We have two major concerns about realizing TESs with an ultra-low NEP of 2×10-19W/Hz: achieving lower thermal conductance and no excess noise with respect to the phonon noise. To realize TESs with phonon-noise-limited NEPs, we need to make thinner (c of ∼93mK and R_n of ∼158mΩ. These TESs were characterized under AC bias using our frequency-division multiplexing readout (1–3 MHz) system. TESs without the absorber show NEPs as low as 1.1×10-19W/Hz with a reasonable response speed (

Ultra-low-noise transition edge sensors (TES) with noise equivalent power lower than 2 × 10^{- 19} W/Hz^{1 / 2} have been fabricated by SRON, which meet the sensitivity requirements for the far-infrared SAFARI instrument on space infrared telescope for cosmology and astrophysics. Our TES detector is based on a titanium/gold (Ti/Au) thermistor on a silicon nitride (SiN) island. The island is thermally linked with SiN legs to a silicon support structure at the bath temperature. The SiN legs are very thin (250 nm), narrow (500 nm), and long (above 300 μ m); these dimensions are needed in leg-isolated bolometers to achieve the required level of sensitivity. In this paper, we describe the latest fabrication process for our TES bolometers with improved sensitivity.