Hot Universe Baryon Surveyor (HUBS), a Chinese space mission, is proposed to find a large fraction of the so-called missing baryons, which would help us to understand more about the structure formation and evolution of the universe. Both theoretical and experimental results show that developing a highly efficient soft X-ray spectrometer over a large field of view and with a high energy resolution is the key to detect the “missing baryons”. X-ray microcalorimeters based on a transition-edge sensor (TES) array is required for HUBS, which aims to have 1 deg² field of view (FoV) with 1' angular resolution and 2 eV energy resolution optimized around 0.6 keV. Taking the high throughput X-ray optical focusing system on HUBS into account, the TES array is designed to have 60 x 60 pixels with an area of 1 mm² for each pixel. The microcalorimeter consists of a TES, a weak thermal link to a heat bath, and a semi-metal or normal metal absorber to increase the X-ray absorption efficiency. When an X-ray photon with a given energy is absorbed, the temperature of the absorber increase, that can be monitored by measuring the resistance change of the TES. A bilayer of a superconductor and a normal metal is used to fabricate a TES with a critical temperature (Tc) of ~100 mK. The latter is set for the required energy resolution. For HUBS, both MoCu and TiAu TES technologies are considered in its development phase. Here we will focus on TiAu TES calorimeters designed and partially fabricated at SRON for HUBS. Recent demonstration of a resolution of 2.5 eV at 5.9 keV in an AC readout at SRON for X-IFU on board of Athena illustrates the promising of this technology. However, the challenging for the HUBS array is the large pixel size. We will report the design and fabrication of prototype HUBS calorimeters.

We are developing X-ray microcalorimeters as a backup option for the baseline detectors in the X-IFU instrument on board the ATHENA space mission led by ESA and to be launched in the early 2030s. 5 × 5 mixed arrays with TiAu transition-edge sensor (TES), which have different high aspect ratios and thus high resistances, have been designed and fabricated to meet the energy resolution requirement of the X-IFU instrument. Such arrays can also be used to optimize the performance of the frequency domain multiplexing (FDM) readout and lead to the final steps for the fabrication of a large detector array. In this work, we present the experimental results from tens of the devices with an aspect ratio (length-to-width) ranging from 1-to-1 up to 6-to-1, measured in a single-pixel mode with a FDM readout system developed at SRON/VTT. We observed a nominal energy resolution of about 2.5 eV at 5.9 keV at bias frequencies ranging from 1 to 5 MHz. These detectors are proving to be the best TES microcalorimeters ever reported in Europe, intending to meet the requirements of the X-IFU instrument, but also those of other future challenging X-ray space missions, fundamental physics experiments, plasma characterization and material analysis.