In the early 2030s, ESAs new X-ray observatory, Athena, is scheduled to be launched. It will carry two main
instruments, one of which is the X-ray Integral Field Unit (X-IFU), an X-ray imaging spectrometer, which will consist of an array of several thousand transition-edge sensors (TESs) with a proposed energy resolution of 2.5 eV for photon energies up to 7 keV. At SRON we develop the backup TES
array based on Ti/Au bilayers with a transition temperature just below 100 mK. In this contribution we will give a broad overview of the properties and capabilities of these state-of-the-art detectors. Over the years we have fabricated and studied a large number of detectors with various
geometries, providing us with a good understanding of how to precisely control the properties of our detectors. We are able to accurately vary the most important detector properties, such as the normal resistance, thermal conductance and critical temperature. This allows us to finely tune our
detectors to meet the demands of various applications. The detectors have demonstrated excellent energy resolutions of below 1.8 eV for 5.9 keV X-rays. By tuning the properties of the devices, they can be optimally matched to various read-out schemes using both AC and DC biasing. The next step is to increase the size of our TES arrays from our current kilo-pixel arrays towards the
full-sized array for X-IFU.
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Large format arrays of transition edge sensor (TES) are crucial for the next generation of X-ray space observatories. Such arrays are required to achieve an energy resolution of Δ E < 3 eV full-width-half-maximum (FWHM) in the soft X-ray energy range. We are currently developing X-ray microcalorimeter arrays as a backup option for the X-IFU instrument on board of ATHENA space telescope, led by ESA and foreseen to be launched in 2031. In this contribution, we report on the development and the characterization of a uniform 32 × 32 pixel array with (length × width) 140 × 30 μ m2 TiAu TESs, which have a 2.3 μ m thick Au absorber for X-ray photons. The pixels have a typical normal resistance Rn = 121 m Ω and a critical temperature Tc ∼ 90 mK. We performed extensive measurements on 60 pixels out of the array in order to show the uniformity of the array. We obtained an energy resolutions between 2.4 and 2.6 eV (FWHM) at 5.9 keV, measured in a single-pixel mode at AC bias frequencies ranging from 1 to 5 MHz, with a frequency domain multiplexing (FDM) readout system, which is developed at SRON/VTT. We also present the detector energy resolution at X-ray with different photon energies generated by a modulated external X-ray source from 1.45 keV up to 8.9 keV. Multiplexing readout across several pixels has also been performed to evaluate the impact of the thermal crosstalk to the instrument's energy resolution budget requirement. This value results in a derived requirement, for the first neighbour, that is less than 1;× 10-3 when considering the ratio between the amplitude of the crosstalk signal to an X-ray pulse (for example at 5.9 keV).

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We are developing a kilo-pixels Ti/Au TES array as a backup option for Athena X-IFU. Here we report on single-pixel performance of a 32 × 32 array operated in a Frequency Division Multiplexing (FDM) readout system, with bias frequencies in the range 1-5 MHz. We have tested the pixels response at several photon energies, by means of a 55Fe radioactive source (emitting Mn-Kα at 5.9 keV) and a Modulated X-ray Source (MXS, providing Cr-Kα at 5.4 keV and Cu-Kα at 8.0 keV). First, we report the procedure used to perform the detector energy scale calibration, usually achieving a calibration accuracy better than ∼0.5 eV in the 5.4-8.9 keV energy range. Then, we present the measured energy resolution at the different energies (best single pixel performance: ΔEFWHM = 2.40 ± 0.09 eV @ 5.4 keV; 2.53 ± 0.10 eV @ 5.9 keV; 2.78 ± 0.16 eV @ 8.0 keV), investigating also the performance dependency from the pixel bias frequency and the count rate. Thanks to long background measurements (∼1 d), we finally detected also the Al-Kα line at 1.5 keV, generated by fluorescence inside the experimental setup. We analyzed this line to obtain a first assessment of the single-pixel performance also at low energy (ΔEFWHM = 1.91 eV ± 0.21 eV @ 1.5 keV), and to evaluate the linearity of the detector response in a large energy band (1.5-8.9 keV).

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Superconducting transition-edge sensors (TESs) are highly sensitive detectors. Based on the outstanding performance on spectral resolution, the X-ray integral field unit (X-IFU) instrument on-board athena will be equipped with a large array of TES-based microcalorimeters. For optimal performance in terms of the energy resolution, it is essential to limit undesirable nonlinearity effects in the TES detector. Weak-link behavior induced on the TES by superconducting leads is such a nonlinearity effect. We designed and fabricated smart test structures to study the effect of the superconducting leads on the intrinsic transition curve of our TiAu-based TES bilayer. We measured and analyzed the resistance versus temperature transition curves of the test structures. We found relations of long-distance proximity effects with TES length and different lead materials. Based on these results, we can redesign and further optimize our TES-based X-ray detectors.

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Transition-edge sensors (TESs) are used as very sensitive thermometers in microcalorimeters aimed at detection of different wavelengths. In particular, for soft X-ray astrophysics, science goals require very high-resolution microcalorimeters which can be achieved with TESs coupled to suitable absorbers. For many applications, there is also need for a high number of pixels which typically requires multiplexing in the readout stage. Frequency-domain multiplexing (FDM) is a common scheme and is the baseline proposed for the ATHENA mission. FDM requires biasing the TES in AC at MHz frequencies. Recently, there has been reported degradation in performances under AC with respect to DC bias. In order to assess the performances of TESs to be used with FDM, it is thus of great interest to compare the performances of the same device both under AC bias and DC bias. This requires two different measurement set-ups with different processes for making the characterization. We report in this work the preliminary results of a single-pixel characterization performed on a TiAu TES under AC and afterwards under DC bias in different facilities. Extraction of dynamical parameters and noise performances are compared in both cases as a first stage for further AC/DC comparison of these devices.@en

Hot Universe Baryon Surveyor (HUBS), a Chinese space mission, is proposed to find a large fraction of the so-called missing baryons, which would help us to understand more about the structure formation and evolution of the universe. Both theoretical and experimental results show that developing a highly efficient soft X-ray spectrometer over a large field of view and with a high energy resolution is the key to detect the “missing baryons”. X-ray microcalorimeters based on a transition-edge sensor (TES) array is required for HUBS, which aims to have 1 deg² field of view (FoV) with 1' angular resolution and 2 eV energy resolution optimized around 0.6 keV. Taking the high throughput X-ray optical focusing system on HUBS into account, the TES array is designed to have 60 x 60 pixels with an area of 1 mm² for each pixel. The microcalorimeter consists of a TES, a weak thermal link to a heat bath, and a semi-metal or normal metal absorber to increase the X-ray absorption efficiency. When an X-ray photon with a given energy is absorbed, the temperature of the absorber increase, that can be monitored by measuring the resistance change of the TES. A bilayer of a superconductor and a normal metal is used to fabricate a TES with a critical temperature (Tc) of ~100 mK. The latter is set for the required energy resolution. For HUBS, both MoCu and TiAu TES technologies are considered in its development phase. Here we will focus on TiAu TES calorimeters designed and partially fabricated at SRON for HUBS. Recent demonstration of a resolution of 2.5 eV at 5.9 keV in an AC readout at SRON for X-IFU on board of Athena illustrates the promising of this technology. However, the challenging for the HUBS array is the large pixel size. We will report the design and fabrication of prototype HUBS calorimeters.

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We are developing a transition edge sensor (TES) microcalorimeter array based on a Ti/Au superconducting bilayer, as a backup option for the X-IFU instrument on the Athena X-ray observatory. The array is read out by a frequency-division multiplexing readout system using a 1–5 MHz frequency band. Extensive research collaborations between NASA/Goddard and SRON have led to new design rules for microcalorimeters such as low resistivity of the superconductor bilayer, moderately high ohmic resistance of the TES by changing the aspect ratio and no extra metal strips. We have improved our detector fabrication process according to these design principles and produced TES arrays. Although single-pixel characterizations of these arrays are ongoing, the best energy resolution of 2.0 eV for 5.9 keV X-ray has been observed with a 120 × 20 μm² TES with a normal resistance of 150 mΩ, biased at 2.2 MHz frequency. This shows that our Ti/Au TES array has a potential to fulfill the detector requirements of the X-IFU instrument.

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We are developing X-ray microcalorimeters as a backup option for the baseline detectors in the X-IFU instrument on board the ATHENA space mission led by ESA and to be launched in the early 2030s. 5 × 5 mixed arrays with TiAu transition-edge sensor (TES), which have different high aspect ratios and thus high resistances, have been designed and fabricated to meet the energy resolution requirement of the X-IFU instrument. Such arrays can also be used to optimize the performance of the frequency domain multiplexing (FDM) readout and lead to the final steps for the fabrication of a large detector array. In this work, we present the experimental results from tens of the devices with an aspect ratio (length-to-width) ranging from 1-to-1 up to 6-to-1, measured in a single-pixel mode with a FDM readout system developed at SRON/VTT. We observed a nominal energy resolution of about 2.5 eV at 5.9 keV at bias frequencies ranging from 1 to 5 MHz. These detectors are proving to be the best TES microcalorimeters ever reported in Europe, intending to meet the requirements of the X-IFU instrument, but also those of other future challenging X-ray space missions, fundamental physics experiments, plasma characterization and material analysis.

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Frequency-division multiplexing is the baseline read-out system for large arrays of superconducting transition-edge sensors (TES’s) under development for the X-ray and infrared instruments like X-IFU (Athena) and SAFARI, respectively. In this multiplexing scheme, the sensors are ac-biased at different frequencies from 1 to 5 MHz and operate as amplitude modulators. Weak superconductivity is responsible for the complex TES resistive transition, experimentally explored in great detail so far, both with dc- and ac-biased read-out schemes. In this paper, we will review the current status of our understanding of the physics of the TES’s and their interaction with the ac bias circuit. In particular, we will compare the behaviour of the TES nonlinear impedance, across the superconducting transition, for several detector families, namely: high-normal-resistance TiAu TES bolometers, low-normal-resistance MoAu TES microcalorimeters and high-normal-resistance TiAu TES microcalorimeters.

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Transition Edge Sensors are ultra-sensitive superconducting detectors with applications in many areas of research, including astrophysics. The device consists of a superconducting thin film, often with additional normal metal features, held close to its transition temperature and connected to two superconducting leads of a higher transition temperature. There is currently no way to reliably assess the performance of a particular device geometry or material composition without making and testing the device. We have developed a proximity effect model based on the Usadel equations to predict the effects of device geometry and material composition on sensor performance. The model is successful in reproducing I - V curves for two devices currently under study. We use the model to suggest the optimal size and geometry for TESs, considering how small the devices can be made before their performance is compromised. In the future, device modelling prior to manufacture will reduce the need for time-consuming and expensive testing.

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SRON is developing X-ray transition edge sensor (TES) calorimeters arrays, as a backup technology for X-IFU instrument on the ATHENA space observatory. These detectors are based on a superconducting TiAu bilayer TES with critical temperature of 100 mK on a 1 μm thick SiN membrane with Au or Au/Bi absorbers. Number of devices have been fabricated and measured using a Frequency Division Multiplexing (FDM) readout system with 1-5 MHz bias frequencies. We measured IV curves, critical temperature, thermal conductance, noise and also X-ray energy resolution at number of selected bias points. So far our best calorimeter shows 3.9 eV X-ray resolution at 6 keV. Here we present a summary of our results and the latest status of development of X-ray calorimeters at SRON.

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SRON is developing ultra-low noise Transition Edge Sensors (TESs) based on a superconducting Ti/Au bilayer on a suspended SiN island with SiN legs for the SAFARI instrument aboard the SPICA mission. We successfully fabricated TESs with very narrow (0.5-0.7 μm) and thin (0.25 μm) SiN legs on different sizes of SiN islands using deep reactiveion etching process. The pixel size is 840x840 μm² and there are variety of designs with and without optical absorbers. For TESs without absorbers, we measured electrical NEPs as low as <1x10^-19 W/√Hz with response time of 0.3 ms and reached the phonon noise limit. Using TESs with absorbers, we quantified the darkness of our setup and confirmed a photon noise level of 2x10^-19 W/√Hz.

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SRON is developing ultra-low-noise transition edge sensors (TESs) based on a superconducting Ti/Au bilayer on a suspended SiN island with SiN legs for SAFARI aboard SPICA. We have two major concerns about realizing TESs with an ultra-low NEP of 2×10-19W/Hz: achieving lower thermal conductance and no excess noise with respect to the phonon noise. To realize TESs with phonon-noise-limited NEPs, we need to make thinner (c of ∼93mK and R_n of ∼158mΩ. These TESs were characterized under AC bias using our frequency-division multiplexing readout (1–3 MHz) system. TESs without the absorber show NEPs as low as 1.1×10-19W/Hz with a reasonable response speed (

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