Design Approach for a Multi Beam Electron Beam Induced Deposition System
Journal Article
(2005)
Author(s)
B van Someren (TU Delft - ImPhys/Charged Particle Optics)
MJ van Bruggen (TU Delft - ImPhys/Charged Particle Optics)
Pieter Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:cef801c2-3664-4e6e-b97e-da1dc93fc253
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Publication Year
2005
Research Group
ImPhys/Charged Particle Optics
Issue number
2
Volume number
27
Pages (from-to)
107-108
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