Capacitive sensor system for sub-nanometer displacement measurement
Conference Paper
(2011)
Author(s)
S. Xia (TU Delft - Electronic Instrumentation)
Stoyan Nihtianova (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
DOI related publication
https://doi.org/10.1109/ICSENS.2011.6127328
To reference this document use:
https://resolver.tudelft.nl/uuid:cfcf1b90-bc23-45e7-8d29-57bd4c100012
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Publication Year
2011
Language
English
Research Group
Electronic Instrumentation
Pages (from-to)
1173-1176
ISBN (print)
978-1-4244-9290-3
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