Capacitive sensor system for sub-nanometer displacement measurement

Conference paper (2011)

Authors

S. Xia Electronic Instrumentation - EEMCS
S. Nihtianova Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2011

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation