Aberration model of a multi beam scanning microscope for electron beam-induced deposition
Journal Article
(2006)
Author(s)
MJ van Bruggen (TU Delft - ImPhys/Charged Particle Optics)
B van Someren (TU Delft - ImPhys/Charged Particle Optics)
Pieter Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:d0142fdc-022a-458e-a4d2-5f5af976ff7e
More Info
expand_more
expand_more
Publication Year
2006
Research Group
ImPhys/Charged Particle Optics
Issue number
1
Volume number
28
Pages (from-to)
42-47
No files available
Metadata only record. There are no files for this record.