Substrate options and add-on process modules for monolithic RF silicon technology

JN Burghartz (TU Delft - Old - EWI Ch. Integrated Sensing Devices)

Marian Bartek (TU Delft - Old - EWI Ch. Integrated Sensing Devices)

B Rejaei (TU Delft - QN/Theoretical Physics)

Lina P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)

A Poliakov (TU Delft - Old - EWI Ch. Integrated Sensing Devices)

NP Pham (TU Delft - Electronic Components, Technology and Materials)

E Boellaard (TU Delft - Electronic Components, Technology and Materials)

TK Ng (TU Delft - Old - EWI Ch. Integrated Sensing Devices)