Microspectrometer with a concave grating fabricated in a MEMS technology
Conference Paper
(2009)
Author(s)
S Grabarnik (TU Delft - Electronic Instrumentation)
A. Emadi (TU Delft - Electronic Instrumentation)
HW Wu (TU Delft - Electronic Instrumentation)
G De Graaf (TU Delft - Electronic Instrumentation)
Reinoud F. Wolfenbuttel (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:d121fa96-7d46-4cdf-9df2-0d2b65b79053
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Publication Year
2009
Research Group
Electronic Instrumentation
Pages (from-to)
1-4
ISBN (print)
1876-6196
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