Modelling of Electro-thermal Filters in CMOS Technology
P.F. Lee (TU Delft - Electrical Engineering, Mathematics and Computer Science)
K.A.A. Makinwa – Mentor (TU Delft - Electrical Engineering, Mathematics and Computer Science)
K.M. Dowling – Mentor (TU Delft - Electrical Engineering, Mathematics and Computer Science)
M. Mastrangeli – Graduation committee member (TU Delft - Electrical Engineering, Mathematics and Computer Science)
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Abstract
An electro-thermal filter (ETF) consists of a heater and a temperature sensor placed in the silicon substrate of a chip. It uses a heat wave to generate a phase shift that depends on a material property known as the thermal diffusivity. Temperature sensors and frequency references based on ETFs boast an impressive untrimmed inaccuracy, but their optimisation has been limited by a lack of accurate models. In this work, COMSOL Multiphysics was used to build and validate a finite element method (FEM) model of an ETF, and key sources of error were identified. The simulation results agreed well with experimental measurements.
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