PVD aluminium nitride as heat-spreader in IC technology

L. La Spina (TU Delft - Electronic Components, Technology and Materials)

H Schellevis (TU Delft - Electronic Components, Technology and Materials)

N Nenadovic (TU Delft - Electronic Components, Technology and Materials)

S Milosavljević (TU Delft - Electronic Components, Technology and Materials)

W.H.A. Wien (TU Delft - Electronic Components, Technology and Materials)

AW van Herwaarden (External organisation)

LK Nanver (TU Delft - Electronic Components, Technology and Materials)