PVD aluminium nitride as heat-spreader in IC technology

Conference paper (2005)

Authors

L. La Spina Electronic Components, Technology and Materials -

H. Schellevis Electronic Components, Technology and Materials -

N Nenadovic Electronic Components, Technology and Materials -

S. Milosavljevic Electronic Components, Technology and Materials -

W.H.A. Wien Electronic Components, Technology and Materials -

AW van Herwaarden External organisation

L.K. Nanver Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

2005

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials