PVD aluminium nitride as heat-spreader in IC technology
L. La Spina (TU Delft - Electronic Components, Technology and Materials)
H Schellevis (TU Delft - Electronic Components, Technology and Materials)
N Nenadovic (TU Delft - Electronic Components, Technology and Materials)
S Milosavljević (TU Delft - Electronic Components, Technology and Materials)
W.H.A. Wien (TU Delft - Electronic Components, Technology and Materials)
AW van Herwaarden (External organisation)
LK Nanver (TU Delft - Electronic Components, Technology and Materials)
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