PVD aluminium nitride as heat-spreader in IC technology

Conference Paper (2005)
Author(s)

L. La Spina (TU Delft - Electronic Components, Technology and Materials)

H Schellevis (TU Delft - Electronic Components, Technology and Materials)

N Nenadovic (TU Delft - Electronic Components, Technology and Materials)

S Milosavljević (TU Delft - Electronic Components, Technology and Materials)

W.H.A. Wien (TU Delft - Electronic Components, Technology and Materials)

AW van Herwaarden (External organisation)

LK Nanver (TU Delft - Electronic Components, Technology and Materials)

Research Group
Electronic Components, Technology and Materials
More Info
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Publication Year
2005
Research Group
Electronic Components, Technology and Materials
Bibliographical Note
Editors onbekend, WPM/STW@en
Pages (from-to)
113-116
ISBN (print)
90-73461-50-2

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