Mechanical model and characterization of thin-film encapsulation for MEMS
Conference Paper
(2010)
Author(s)
VG Huerta (External organisation)
F. Santagata (TU Delft - Electronic Components, Technology and Materials)
L Mele (TU Delft - Electronic Components, Technology and Materials)
Poot Marco (TU Delft - OLD Road and Railway Engineering)
J.F. Creemer (TU Delft - Electronic Components, Technology and Materials)
Pasqualina Maria Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:d2a9f4d6-b842-4121-834c-2b6d6730c4bc
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Publication Year
2010
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
85-88
ISBN (print)
978-90-73461-67-3
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