Mechanical model and characterization of thin-film encapsulation for MEMS

Conference paper (2010)

Authors

VG Huerta External organisation
F. Santagata Electronic Components, Technology and Materials - EEMCS
L. Mele Electronic Components, Technology and Materials - EEMCS
M.R. Poot OLD Road and Railway Engineering
J.F. Creemer Electronic Components, Technology and Materials - EEMCS
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2010

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials