Mechanical model and characterization of thin-film encapsulation for MEMS

Conference Paper (2010)
Author(s)

VG Huerta (External organisation)

F. Santagata (TU Delft - Electronic Components, Technology and Materials)

L Mele (TU Delft - Electronic Components, Technology and Materials)

Poot Marco (TU Delft - OLD Road and Railway Engineering)

J.F. Creemer (TU Delft - Electronic Components, Technology and Materials)

Pasqualina Maria Sarro (TU Delft - Electronic Components, Technology and Materials)

Research Group
Electronic Components, Technology and Materials
More Info
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Publication Year
2010
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
85-88
ISBN (print)
978-90-73461-67-3

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