VG Huerta | TU Delft Repository

VH

VG Huerta

Conference paper (1)

Journal article (1)

2 records found

1

Mechanical design and characterization for MEMS thin-film packaging

Journal article (2011) - F. Santagata (author), J.J.M. Zaal (author), VG Huerta (author), L. Mele (author), J.F. Creemer (author), Pasqualina M Sarro (author)

Mechanical model and characterization of thin-film encapsulation for MEMS

Conference paper (2010) - VG Huerta (author), F. Santagata (author), L. Mele (author), M.R. Poot (author), J.F. Creemer (author), Pasqualina M Sarro (author)