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VG Huerta

Conference paper (1)

Journal article (1)

2 records found

1

Mechanical design and characterization for MEMS thin-film packaging

Journal article (2011) - Fabio Santagata (author) , J.J.M. Zaal (author) , VG Huerta (author) , L Mele (author) , J.F. Creemer (author) , Pasqualina Sarro (author)

Mechanical model and characterization of thin-film encapsulation for MEMS

Conference paper (2010) - VG Huerta (author) , Fabio Santagata (author) , L Mele (author) , M.R. Poot (author) , J.F. Creemer (author) , P. M. Sarro (author)