New photoresist coating method for 3-D structured wafers
Journal Article
(2000)
Author(s)
VG Kiutchoukov (External organisation)
JR Mollinger (TU Delft - Electronic Instrumentation)
A Bossche (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:d448b0fe-18ea-46fa-b768-3159f4b42b24
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Publication Year
2000
Research Group
Electronic Instrumentation
Issue number
1-3
Volume number
85
Pages (from-to)
377-383
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