Particle filters integrated inside a silicon wafer
Conference Paper
(2004)
Author(s)
Warner J. Venstra (TU Delft - Mechatronic Systems Design)
PN Pham (TU Delft - Electronic Components, Technology and Materials)
PM Sarro (TU Delft - Electronic Components, Technology and Materials)
Jan van Eijk (TU Delft - Mechatronic Systems Design)
Research Group
Mechatronic Systems Design
To reference this document use:
https://resolver.tudelft.nl/uuid:d47e92b8-a9e2-46ba-a433-953bec30396d
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Publication Year
2004
Research Group
Mechatronic Systems Design
Pages (from-to)
1-4
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