Particle filters integrated inside a silicon wafer

Conference paper (2004)

Authors

W.J. Venstra Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
PN Pham Electronic Components, Technology and Materials - EEMCS
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
J. van Eijk Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
Research Group
Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)
Elektrotechniek Techniek
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Published Date

2004

Language

Undefined/Unknown

Reuse Rights

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design