In-situ study by spectroscopic ellipsometry of ETP-CVD a-Si:H
Conference Paper
(2007)
Author(s)
MA Wank (TU Delft - Photovoltaic Materials and Devices)
R A C M M van van Swaaij (TU Delft - Electronic Components, Technology and Materials)
MCM van de Sanden (External organisation)
Research Group
Photovoltaic Materials and Devices
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https://resolver.tudelft.nl/uuid:d5a5bf5e-3625-41a8-ad76-6ffc7ce38741
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Publication Year
2007
Research Group
Photovoltaic Materials and Devices
Pages (from-to)
558-563
ISBN (print)
978-90-73461-49-9
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