Automated Contacting of On-Wafer Devices for RF Testing

Conference paper (2020)

Authors

F.A. Mubarak Electronics - EEMCS , VSL Dutch Metrology Institute
C. De Martino Electronics - EEMCS
R. Toskovic VSL Dutch Metrology Institute
G Rietveld VSL Dutch Metrology Institute
M. Spirito Electronics - EEMCS
Research Group
Electronics (EEMCS) (TU Delft)
Uncertainty Measurement uncertainty Measurement techniques Microwave measurements On-wafer contacting On-wafer probing Precision measurements
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Published Date

2020

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronics

Abstract

A method is presented for automated probing of on-wafer devices for measurements at millimetre-wave frequencies. The proposed method automatically detects the contact between the measurement probe and on-wafer device, based on the evaluation of variation in the input reflection coefficient. It is shown that, using this automated technique, about five times better measurement repeatability is achieved in millimetre-wave device characterisation.

Files

09191800.pdf
(.pdf | 3.9 Mb)