Automated Contacting of On-Wafer Devices for RF Testing

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Automated Contacting of On-Wafer Devices for RF Testing

Conference Paper (2020)

Author(s)

F. Mubarak (TU Delft - Electrical Engineering, Mathematics and Computer Science, VSL Dutch Metrology Institute)

C.D. Martino (TU Delft - Electrical Engineering, Mathematics and Computer Science)

R. Toskovic (VSL Dutch Metrology Institute)

G Rietveld (VSL Dutch Metrology Institute)

M. Spirito (TU Delft - Electrical Engineering, Mathematics and Computer Science)

Research Group

Electronics

Uncertainty Measurement uncertainty Measurement techniques Microwave measurements On-wafer contacting On-wafer probing Precision measurements

DOI related publication

https://doi.org/10.1109/CPEM49742.2020.9191800 Final published version

To reference this document use

https://resolver.tudelft.nl/uuid:d8894391-9833-4262-baa0-f23d9a6bf336

More Info

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Publication Year

2020

Language

English

Research Group

Electronics

Article number

9191800

Pages (from-to)

1-2

ISBN (print)

978-1-7281-5899-0

ISBN (electronic)

978-1-7281-5898-3

Event

2020 Conference on Precision Electromagnetic Measurements, CPEM 2020 (2020-08-24 - 2020-08-28), Virtual, Denver, United States

Downloads counter

181

Abstract

A method is presented for automated probing of on-wafer devices for measurements at millimetre-wave frequencies. The proposed method automatically detects the contact between the measurement probe and on-wafer device, based on the evaluation of variation in the input reflection coefficient. It is shown that, using this automated technique, about five times better measurement repeatability is achieved in millimetre-wave device characterisation.