A versatile CMOS compatible PECVD silicon carbide MEMS technology
Conference Paper
(2009)
Author(s)
L Pakula (TU Delft - Electronic Instrumentation)
V. Rajaraman (TU Delft - Electronic Instrumentation)
PJ French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:d9e395a1-c7d2-4ae2-8d6d-926bcf17e2ad
More Info
expand_more
expand_more
Publication Year
2009
Research Group
Electronic Instrumentation
Pages (from-to)
0-4
ISBN (print)
978-81-908468-0-6
No files available
Metadata only record. There are no files for this record.