Baseline of the High Density Plasma Deposition tool asessed in SiO2 deposition
Report
(1996)
Author(s)
JBC van de Hilst (External organisation)
DJ de Boer (External organisation)
GCAM Janssen (TU Delft - OLD Metals Processing, Microstructures and Properties)
S Radelaar (TU Delft - OLD Metals Processing, Microstructures and Properties)
Research Group
OLD Metals Processing, Microstructures and Properties
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Publication Year
1996
Language
English
Research Group
OLD Metals Processing, Microstructures and Properties
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