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JBC van de Hilst

Journal article (2)

Report (1)

3 records found

1

SiOFx and SiO2 deposition in an ECR-HDP reactor: Tool characterisation and film analysis

Journal article (1997) - AJ Kalkman (author) , DJ de Boer (author) , H Fukuda (author) , JBC van de Hilst (author) , G.C.A.M. Janssen (author) , S Radelaar (author)

High electric field transport in bismuth nanoconstrictions

Journal article (1996) - JBC van de Hilst (author) , JA van Hulst (author) , NN Gribov (author) , Jaap Caro (author) , S Radelaar (author)

Baseline of the High Density Plasma Deposition tool asessed in SiO2 deposition

Report (1996) - JBC van de Hilst (author) , DJ de Boer (author) , GCAM Janssen (author) , S Radelaar (author)