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Jv
JBC van de Hilst
3 records found
1
Authored
SiOFx and SiO2 deposition in an ECR-HDP reactor: Tool characterisation and film analysis
Journal article (1997) -
AJ Kalkman
,
DJ de Boer
,
H Fukuda
,
JBC van de Hilst
,
G.C.A.M. Janssen
,
S Radelaar
Baseline of the High Density Plasma Deposition tool asessed in SiO2 deposition
Report (1996) -
JBC van de Hilst
,
DJ de Boer
,
G.C.A.M. Janssen
,
S Radelaar
High electric field transport in bismuth nanoconstrictions
Journal article (1996) -
JBC van de Hilst
,
JA van Hulst
,
NN Gribov
,
J. Caro-Schuurman
,
S Radelaar
