Characterization of front to backwafer bulk micromachining using electrical overlay test structures
Conference Paper
(2002)
Author(s)
H.W. van Zeijl (TU Delft - Electronic Components, Technology and Materials)
J Slabbekoorn (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:dc035185-5c4c-488b-a083-3e31d9382799
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Publication Year
2002
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
343-346
ISBN (print)
973-0-02472-3
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