Measuring wavefronts of displacement interferometer systems with sub-nm uncertainty

Conference paper (2013)

Authors

A.J.H. Meskers Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
J.W. Spronck Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
R.H. Munnig Schmidt Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
Research Group
Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2013

Language

English

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design

Abstract

In this article we describe a new and easy way to implement a measurement tool that can vary the size of the measurement area and the phase resolution without the need for changing hardware. It can evaluate wavefronts at high repeatability before as well as after an interferometer without a decrease in measurement performance and it can be applied for both homodyne and heterodyne interferometer systems. The wavefront measurement method presented is an interferometer itself, where a sample of a small area in the wavefront is taken by an optical multimode fiber and compared with a reference. It allows for measuring phase differences with a resolution of ~90µrad or ~10pm (¿=633nm) at a repeatability better than 1nm over one week. 3D wavefront reconstructions are obtained by combining multiple measurements.