A 117DB in-Band CMRR 98.5DB SNR Capacitance-to-Digital Converter for Sub-NM Displacement Sensing with an Electrically Floating Target

Conference paper (2018)

Authors

H. Jiang Electronic Instrumentation - EEMCS
Samira Amani Student
J.G. Vogel Electronic Instrumentation - EEMCS
S. Heidary Shalmany Electronic Instrumentation - EEMCS
S. Nihtianova Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
Copyright: © 2018 H. Jiang, Samira Amani, J.G. Vogel, S. Heidary Shalmany, S. Nihtianova
DOI: https://doi.org/10.1109/VLSIC.2018.8502363
Sensors Interference Energy efficiency Electrodes Electric fields Capacitors Signal to noise ratio
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Published Date

2018

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation

Abstract

This paper describes a high-performance Capacitance-to-Digital Converter (CDC) for sub-nm displacement sensing with an electrically floating target. Intended to be integrated into a displacement sensor probe, the CDC consumes only 560μW. It achieves 98.5dB SNR in a 1ms conversion time, which is 34 times more energy-efficient than the prior art. Moreover, it also offers a 117dB in-band (1kHz) Common-mode Rejection Ratio (CMRR), providing decent electric field interference immunity.

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