A 117DB in-Band CMRR 98.5DB SNR Capacitance-to-Digital Converter for Sub-NM Displacement Sensing with an Electrically Floating Target
Hui Jiang (TU Delft - Electronic Instrumentation)
Samira Amani (Student TU Delft)
Johan G. Vogel (TU Delft - Electronic Instrumentation)
Saleh Heidary Shalmany (TU Delft - Electronic Instrumentation)
Stoyan Nihtianov (TU Delft - Electronic Instrumentation)
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Abstract
This paper describes a high-performance Capacitance-to-Digital Converter (CDC) for sub-nm displacement sensing with an electrically floating target. Intended to be integrated into a displacement sensor probe, the CDC consumes only 560μW. It achieves 98.5dB SNR in a 1ms conversion time, which is 34 times more energy-efficient than the prior art. Moreover, it also offers a 117dB in-band (1kHz) Common-mode Rejection Ratio (CMRR), providing decent electric field interference immunity.