Cl2-based inductively coupled plasma etching of photonic crystals in InP,

Conference paper (2004)

Authors

RW van der Heijden External organisation
CF Carlström External organisation
MSP Andriesse QN/Kavli Nanolab Delft - AS
E.W.J.M. van der Drift QN/Kavli Nanolab Delft - AS
EJ Geluk Electronic Components, Technology and Materials - EEMCS
F Karouta External organisation
P Nouwens External organisation
YS Oei External organisation
T de Vries External organisation
H.W.M. Salemink QN/Fysics of NanoElectronics
Research Group
QN/Kavli Nanolab Delft (AS) (TU Delft)
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Published Date

2004

Language

Undefined/Unknown

Reuse Rights

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Faculty

Applied Sciences

Department

QN/Quantum Nanoscience

Research Group

QN/Kavli Nanolab Delft