Cl2-based inductively coupled plasma etching of photonic crystals in InP,

RW van der Heijden (External organisation)

CF Carlström (External organisation)

MSP Andriesse (TU Delft - QN/Kavli Nanolab Delft)

E.W.J.M. van der Drift (TU Delft - QN/Kavli Nanolab Delft)

EJ Geluk (TU Delft - Electronic Components, Technology and Materials)

F Karouta (External organisation)

P Nouwens (External organisation)

YS Oei (External organisation)

T de Vries (External organisation)

Huub Salemink (TU Delft - QN/Fysics of NanoElectronics)