Parameter calibration on post-implantation dopant diffusion
Conference Paper
(2004)
Author(s)
J Fu (TU Delft - Electronic Components, Technology and Materials)
W Crans (TU Delft - Electronic Components, Technology and Materials)
WJ Eysenga (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
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https://resolver.tudelft.nl/uuid:e60eeb8f-a919-492c-a100-95fe1d3e167a
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Publication Year
2004
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
191-198
ISBN (print)
0-7803-8420-2
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