Integration of a fabrication process for an aluminum single-electron transistor and a scanning force probe for tuning-fork-based probe microscopy

Journal article (2010)

Authors

K Suter External organisation
T Akiyama External organisation
NF de Rooij External organisation
M Huefner External organisation
U. Staufer Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
Research Group
Micro and Nano Engineering (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2010

Language

English

Reuse Rights

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Micro and Nano Engineering