Integration of a fabrication process for an aluminum single-electron transistor and a scanning force probe for tuning-fork-based probe microscopy

Suter, K; Akiyama, T; de Rooij, NF; Huefner, M; Staufer, U

Integration of a fabrication process for an aluminum single-electron transistor and a scanning force probe for tuning-fork-based probe microscopy

Journal article (2010)

Authors

K Suter External organisation

T Akiyama External organisation

NF de Rooij External organisation

M Huefner External organisation

U Staufer Micro and Nano Engineering

Research Group

Micro and Nano Engineering

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Published Date

2010

Language

English

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Research Group

Micro and Nano Engineering

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