Integration of a fabrication process for an aluminum single-electron transistor and a scanning force probe for tuning-fork-based probe microscopy
Journal Article
(2010)
Author(s)
K Suter (External organisation)
T Akiyama (External organisation)
NF de Rooij (External organisation)
M Huefner (External organisation)
U STAUFER (TU Delft - Micro and Nano Engineering)
Research Group
Micro and Nano Engineering
To reference this document use:
https://resolver.tudelft.nl/uuid:e650bf0d-12e8-4a6f-928e-4f0d0b6c4374
More Info
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Publication Year
2010
Language
English
Research Group
Micro and Nano Engineering
Issue number
5
Volume number
19
Pages (from-to)
1088-1097
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