Versatile wire configuration for independent actuation of bending and torsion displacements of microcantilevers
Conference Paper
(2005)
Author(s)
W.J. Venstra (TU Delft - Mechatronic Systems Design)
M van der Velden (TU Delft - Mechatronic Systems Design)
JW Spronck (TU Delft - Mechatronic Systems Design)
Jan van Eijk (TU Delft - Mechatronic Systems Design)
Lina Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Mechatronic Systems Design
To reference this document use:
https://resolver.tudelft.nl/uuid:e6929827-4e88-4f8a-9ab5-556e9a53a0f4
More Info
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Publication Year
2005
Research Group
Mechatronic Systems Design
Bibliographical Note
neo@en
Pages (from-to)
584-587
ISBN (print)
0-7803-9057-1
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