Versatile wire configuration for independent actuation of bending and torsion displacements of microcantilevers

Conference paper (2005)

Authors

W.J. Venstra Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

M van der Velden Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

J.W. Spronck Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

J. van Eijk Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)

More Info

expand_more

To reference this document use:

http://resolver.tudelft.nl/uuid:e6929827-4e88-4f8a-9ab5-556e9a53a0f4

Published Date

2005

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design