Versatile wire configuration for independent actuation of bending and torsion displacements of microcantilevers

Conference Paper (2005)
Author(s)

Warner J. Venstra (TU Delft - Mechatronic Systems Design)

M van der Velden (TU Delft - Mechatronic Systems Design)

Jo Spronck (TU Delft - Mechatronic Systems Design)

J. van Eijk (TU Delft - Mechatronic Systems Design)

P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)

Research Group
Mechatronic Systems Design
More Info
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Publication Year
2005
Research Group
Mechatronic Systems Design
Bibliographical Note
neo@en
Pages (from-to)
584-587
ISBN (print)
0-7803-9057-1

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