Using deformable surface for thin substrate transport and positioning system: Initial design and preliminary results
Conference Paper
(2014)
Author(s)
H.P. Vuong (TU Delft - Mechatronic Systems Design)
Ron van Ostayen (TU Delft - Mechatronic Systems Design)
R.H. Munnig Schmidt (TU Delft - Mechatronic Systems Design)
Research Group
Mechatronic Systems Design
To reference this document use:
https://resolver.tudelft.nl/uuid:e69e92a5-e883-49f8-9c4b-39deaa860a34
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Publication Year
2014
Language
English
Research Group
Mechatronic Systems Design
Pages (from-to)
283-286
ISBN (print)
978-0-9566790-3-1
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