Using deformable surface for thin substrate transport and positioning system: Initial design and preliminary results

Conference Paper (2014)
Author(s)

H.P. Vuong (TU Delft - Mechatronic Systems Design)

Ron van Ostayen (TU Delft - Mechatronic Systems Design)

R.H. Munnig Schmidt (TU Delft - Mechatronic Systems Design)

Research Group
Mechatronic Systems Design
More Info
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Publication Year
2014
Language
English
Research Group
Mechatronic Systems Design
Pages (from-to)
283-286
ISBN (print)
978-0-9566790-3-1

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