Using deformable surface for thin substrate transport and positioning system: Initial design and preliminary results

Conference paper (2014)

Authors

H.P. Vuong Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

R.A.J. van Ostayen Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

R.H. Munnig Schmidt Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

Research Group

Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)

More Info

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http://resolver.tudelft.nl/uuid:e69e92a5-e883-49f8-9c4b-39deaa860a34

Published Date

2014

Language

English

Reuse Rights

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design