HV
H.P. Vuong
Authored
6 records found
Air-based contactless actuation system for thin substrates
The concept of using a controlled deformable surface
Contactless transport for high-tech industrial applications by applying a thin pressurised air film beneath a substrate. High-precision positioning accuracy in the nm range and multiple-g accelerations have already been achieved in the lab.@en
Contactless transport for high-tech industrial applications by applying a thin pressurised air film beneath a substrate. High-precision positioning accuracy in the nm range and multiple-g accelerations have already been achieved in the lab.@en
Contactless transport for high-tech industrial applications by applying a thin pressurised air film beneath a substrate. High-precision positioning accuracy in the nm range and multiple-g accelerations have already been achieved in the lab.@en