HV

H.P. Vuong

Authored

6 records found

Air-based contactless actuation system for thin substrates

The concept of using a controlled deformable surface

Contactless transport for high-tech industrial applications by applying a thin pressurised air film beneath a substrate. High-precision positioning accuracy in the nm range and multiple-g accelerations have already been achieved in the lab.@en
Contactless transport for high-tech industrial applications by applying a thin pressurised air film beneath a substrate. High-precision positioning accuracy in the nm range and multiple-g accelerations have already been achieved in the lab.@en
Contactless transport for high-tech industrial applications by applying a thin pressurised air film beneath a substrate. High-precision positioning accuracy in the nm range and multiple-g accelerations have already been achieved in the lab.@en