The complex formation of ripples during depth profiling of Si with low energy, grazing oxygen beams
Journal Article
(1998)
Author(s)
ZX Jiang (External organisation)
PFA Alkemade (TU Delft - Old - sect Electronic Materials (NS/EM))
Research Group
Old - sect Electronic Materials (NS/EM)
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https://resolver.tudelft.nl/uuid:e6d871f9-9a18-4600-9353-f6ab30f891fb
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Publication Year
1998
Research Group
Old - sect Electronic Materials (NS/EM)
Bibliographical Note
ISSN: 00036951@en
Issue number
3
Volume number
73
Pages (from-to)
315-318
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