Local digital etching and infiltration for tuning of a H1-cavity in deeply etched InP/InGaAsP/InP photonic crystals

Kicken, HHJE; Alkemade, PFA; van der Heijden, RW; Karouta, F; Notzel, R; van der Drift, EWJM; Salemink, HWM

Local digital etching and infiltration for tuning of a H1-cavity in deeply etched InP/InGaAsP/InP photonic crystals

Conference paper (2009)

Authors

HHJE Kicken QN/Photronic Devices

PFA Alkemade QN/Fysics of NanoElectronics, QN/Kavli Nanolab Delft

RW van der Heijden External organisation

F Karouta External organisation

R Notzel External organisation

EWJM van der Drift QN/Kavli Nanolab Delft

HWM Salemink QN/Photronic Devices

Research Group

QN/Photronic Devices

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Published Date

2009

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Research Group

QN/Photronic Devices

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