Local digital etching and infiltration for tuning of a H1-cavity in deeply etched InP/InGaAsP/InP photonic crystals
Conference Paper
(2009)
Author(s)
HHJE Kicken (TU Delft - QN/Photronic Devices)
P. F.A. Alkemade (TU Delft - QN/Fysics of NanoElectronics, TU Delft - QN/Kavli Nanolab Delft)
RW van der Heijden (External organisation)
F Karouta (External organisation)
R Notzel (External organisation)
EWJM van der Drift (TU Delft - QN/Kavli Nanolab Delft)
H. W.M. Salemink (TU Delft - QN/Photronic Devices)
Research Group
QN/Photronic Devices
DOI related publication
https://doi.org/DOI: 101109/iciprm
To reference this document use:
https://resolver.tudelft.nl/uuid:e73d2a79-dcf0-43ad-8f11-07c444283d62
More Info
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Publication Year
2009
Research Group
QN/Photronic Devices
Pages (from-to)
31-34
ISBN (print)
978-1-4244-3432-9
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