Local digital etching and infiltration for tuning of a H1-cavity in deeply etched InP/InGaAsP/InP photonic crystals

Conference paper (2009)

Authors

HHJE Kicken QN/Photronic Devices
P.F.A. Alkemade QN/Kavli Nanolab Delft - AS , QN/Fysics of NanoElectronics
RW van der Heijden External organisation
F Karouta External organisation
R Notzel External organisation
E.W.J.M. van der Drift QN/Kavli Nanolab Delft - AS
H.W.M. Salemink QN/Photronic Devices
Research Group
QN/Photronic Devices
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Published Date

2009

Language

Undefined/Unknown

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Research Group

QN/Photronic Devices