Integrated 6-DoF Lorentz Actuator with Gravity Compensation for Vibration Isolation in In-Line Surface Metrology
Doctoral Thesis
(2017)
Author(s)
R. Deng (TU Delft - Mechatronic Systems Design)
Contributor(s)
R.H. Munnig Schmidt – Promotor (TU Delft - Mechatronic Systems Design)
Jo W. Spronck – Copromotor (TU Delft - Mechatronic Systems Design)
Research Group
Mechatronic Systems Design
Copyright
© 2017 R. Deng
To reference this document use:
https://doi.org/10.4233/uuid:e8590c25-5cfc-43a9-989e-e98b1ea9a8d8
More Info
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Publication Year
2017
Language
English
Copyright
© 2017 R. Deng
Research Group
Mechatronic Systems Design
ISBN (print)
978-94-6186-833-6
Reuse Rights
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