Integrated 6-DoF Lorentz Actuator with Gravity Compensation for Vibration Isolation in In-Line Surface Metrology
Doctoral Thesis
(2017)
Author(s)
Ruijun Deng (TU Delft - Mechanical Engineering)
Contributor(s)
Robert Munnig Schmidt – Promotor (TU Delft - Mechanical Engineering)
Jo Spronck – Copromotor (TU Delft - Mechanical Engineering)
Research Group
Mechatronic Systems Design
DOI related publication
https://doi.org/10.4233/uuid:e8590c25-5cfc-43a9-989e-e98b1ea9a8d8
Final published version
To reference this document use
https://doi.org/10.4233/uuid:e8590c25-5cfc-43a9-989e-e98b1ea9a8d8
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Publication Year
2017
Language
English
Research Group
Mechatronic Systems Design
ISBN (print)
978-94-6186-833-6
Downloads counter
351
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