Integrated 6-DoF Lorentz Actuator with Gravity Compensation for Vibration Isolation in In-Line Surface Metrology

Doctoral Thesis (2017)
Author(s)

R. Deng (TU Delft - Mechatronic Systems Design)

Contributor(s)

R.H. Munnig Schmidt – Promotor (TU Delft - Mechatronic Systems Design)

Jo W. Spronck – Copromotor (TU Delft - Mechatronic Systems Design)

Research Group
Mechatronic Systems Design
Copyright
© 2017 R. Deng
More Info
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Publication Year
2017
Language
English
Copyright
© 2017 R. Deng
Research Group
Mechatronic Systems Design
ISBN (print)
978-94-6186-833-6
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