Ultra-high depth resolution with a grazing sub-keV oxygen beam in a magnetic sector SIMS

Journal article (1998)

Authors

P.F.A. Alkemade Old - sect Electronic Materials (NS/EM)
ZX Jiang External organisation
CCG Visser External organisation
S Radelaar OLD Metals Processing, Microstructures and Properties
WM Arnoldbik External organisation
Research Group
Old - sect Electronic Materials (NS/EM)
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Published Date

1998

Language

Undefined/Unknown

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Research Group

Old - sect Electronic Materials (NS/EM)