Ultra-high depth resolution with a grazing sub-keV oxygen beam in a magnetic sector SIMS
Journal Article
(1998)
Author(s)
P. F.A. Alkemade (TU Delft - Old - sect Electronic Materials (NS/EM))
ZX Jiang (External organisation)
CCG Visser (External organisation)
S Radelaar (TU Delft - OLD Metals Processing, Microstructures and Properties)
WM Arnoldbik (External organisation)
Research Group
Old - sect Electronic Materials (NS/EM)
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https://resolver.tudelft.nl/uuid:ed227de9-b07d-4956-9e31-2ff4ccbf0f03
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Publication Year
1998
Research Group
Old - sect Electronic Materials (NS/EM)
Bibliographical Note
ISSN: 0734-211X@en
Issue number
1
Volume number
16
Pages (from-to)
373-376
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