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Post-fabrication frequency trimming of coplanar-waveguide resonators in circuit QED quantum processors

Journal Article (2023)
Authors

S. Valles Sanclemente (TU Delft - QuTech Advanced Research Centre, Kavli institute of nanoscience Delft, TU Delft - QCD/DiCarlo Lab)

S. L.M. van der Meer (TU Delft - QCD/DiCarlo Lab, Kavli institute of nanoscience Delft, TU Delft - QuTech Advanced Research Centre)

Matvey Finkel (Kavli institute of nanoscience Delft, TU Delft - QCD/DiCarlo Lab, TU Delft - QuTech Advanced Research Centre)

N. Muthusubramanian (Kavli institute of nanoscience Delft, TU Delft - QuTech Advanced Research Centre, TU Delft - QN/Kavli Nanolab Delft)

M. Beekman (TU Delft - QuTech Advanced Research Centre, TU Delft - BUS/TNO STAFF)

H. Ali (Kavli institute of nanoscience Delft, TU Delft - QCD/DiCarlo Lab, TU Delft - QuTech Advanced Research Centre)

J. F. Marques (TU Delft - QuTech Advanced Research Centre, Kavli institute of nanoscience Delft, TU Delft - QCD/DiCarlo Lab)

C. Zachariadis (TU Delft - QN/Kavli Nanolab Delft, TU Delft - QuTech Advanced Research Centre, Kavli institute of nanoscience Delft)

H. M. Veen (TU Delft - QuTech Advanced Research Centre, TU Delft - QCD/DiCarlo Lab, Kavli institute of nanoscience Delft)

T. Stavenga (Kavli institute of nanoscience Delft, TU Delft - QCD/DiCarlo Lab, TU Delft - QuTech Advanced Research Centre)

N Haider (TU Delft - QuTech Advanced Research Centre, TU Delft - BUS/TNO STAFF)

L Di Carlo (TU Delft - QuTech Advanced Research Centre, Kavli institute of nanoscience Delft, TU Delft - QCD/DiCarlo Lab)

Research Group
QCD/DiCarlo Lab
Copyright
© 2023 S. Valles Sanclemente, S.L.M. van der Meer, M. Finkel, N. Muthusubramanian, M.C. Beekman, H.A.S. Ali, J.M. Ferreira Marques, C. Zachariadis, H.M. Veen, T. Stavenga, S.N. Haider, L. DiCarlo
To reference this document use:
https://doi.org/10.1063/5.0148222
More Info
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Publication Year
2023
Language
English
Copyright
© 2023 S. Valles Sanclemente, S.L.M. van der Meer, M. Finkel, N. Muthusubramanian, M.C. Beekman, H.A.S. Ali, J.M. Ferreira Marques, C. Zachariadis, H.M. Veen, T. Stavenga, S.N. Haider, L. DiCarlo
Research Group
QCD/DiCarlo Lab
Issue number
3
Volume number
123
DOI:
https://doi.org/10.1063/5.0148222
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Abstract

We present the use of a set of airbridges to trim the frequency of microwave coplanar-waveguide (CPW) resonators post-fabrication. This method is compatible with the fabrication steps of conventional CPW airbridges and crossovers and increases device yield by allowing compensation of design and fabrication uncertainty with 100 MHz range and 10 MHz resolution. We showcase two applications in circuit QED. The first is the elimination of frequency collisions between resonators intended to readout different transmons by frequency-division multiplexing. The second is frequency matching of readout and Purcell-filter resonator pairs. Combining this matching with transmon frequency trimming by laser annealing reliably achieves fast and high-fidelity readout across 17-transmon quantum processors.