Influence of the plasma pretreatment of GaAs(100) and Si(100) surfaces on the optical and structural properties of Si3N4/GaAs and a-SiGe/Si interfaces

Pincik, E; Jergel, M; Kucera, M; van Swaaij, Rene; Ivanco, J; Senderák, R; Zeman, Miro; Müllerová, J; Brunel, M

Influence of the plasma pretreatment of GaAs(100) and Si(100) surfaces on the optical and structural properties of Si3N4/GaAs and a-SiGe/Si interfaces

Journal article (2000)

Authors

E Pincik External organisation

M Jergel External organisation

M Kucera External organisation

Rene van Swaaij Electronic Components, Technology and Materials

J Ivanco External organisation

R Senderák External organisation

Miro Zeman Electronic Components, Technology and Materials

J Müllerová External organisation

M Brunel External organisation

Research Group

Electronic Components, Technology and Materials

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Published Date

2000

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Research Group

Electronic Components, Technology and Materials

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