Influence of the plasma pretreatment of GaAs(100) and Si(100) surfaces on the optical and structural properties of Si3N4/GaAs and a-SiGe/Si interfaces
Journal Article
(2000)
Author(s)
E Pincik (External organisation)
M Jergel (External organisation)
M Kucera (External organisation)
René A.C.M.M. Swaaij (TU Delft - Electronic Components, Technology and Materials)
J Ivanco (External organisation)
R Senderák (External organisation)
M Zeman (TU Delft - Electronic Components, Technology and Materials)
J Mullerova (External organisation)
M Brunel (External organisation)
Research Group
Electronic Components, Technology and Materials
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https://resolver.tudelft.nl/uuid:f062f18e-f367-44a4-887a-244e16c2e245
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Publication Year
2000
Research Group
Electronic Components, Technology and Materials
Issue number
166
Pages (from-to)
72-76
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