Influence of the plasma pretreatment of GaAs(100) and Si(100) surfaces on the optical and structural properties of Si3N4/GaAs and a-SiGe/Si interfaces

Journal article (2000)

Authors

E Pincik External organisation
M Jergel External organisation
M Kucera External organisation
R.A.C.M.M. van Swaaij Electronic Components, Technology and Materials - EEMCS
J Ivanco External organisation
R Senderák External organisation
M. Zeman Electronic Components, Technology and Materials - EEMCS
J Mullerova External organisation
M Brunel External organisation
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2000

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials