Multibeam electron source for nanofrabrication and multibeam imaging
Conference Paper
(2005)
Author(s)
B van Someren (TU Delft - ImPhys/Charged Particle Optics)
MJ van Bruggen (TU Delft - ImPhys/Charged Particle Optics)
Pieter Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:f0fdb724-ad04-4556-921f-08e2ffe8b543
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Publication Year
2005
Research Group
ImPhys/Charged Particle Optics
Pages (from-to)
30-31
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