Quantum Noise Effects in e-Beam Lithography and Metrology
Doctoral Thesis
(2017)
Author(s)
Thomas Verduin (TU Delft - ImPhys/Charged Particle Optics)
Contributor(s)
Pieter Kruit – Promotor (TU Delft - ImPhys/Charged Particle Optics)
Kees Hagen – Copromotor (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://doi.org/10.4233/uuid:f214f594-a21f-4318-9f29-9776d60ab06c
More Info
expand_more
expand_more
Publication Year
2017
Language
English
Research Group
ImPhys/Charged Particle Optics
ISBN (print)
978-94-6186-782-7
Reuse Rights
Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.