Quantum Noise Effects in e-Beam Lithography and Metrology
Doctoral Thesis
(2017)
Author(s)
Thomas Verduin (TU Delft - ImPhys/Charged Particle Optics)
Contributor(s)
Pieter Kruit – Promotor (TU Delft - ImPhys/Charged Particle Optics)
Kees Hagen – Copromotor (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
DOI related publication
https://doi.org/10.4233/uuid:f214f594-a21f-4318-9f29-9776d60ab06c
Final published version
To reference this document use
https://doi.org/10.4233/uuid:f214f594-a21f-4318-9f29-9776d60ab06c
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Publication Year
2017
Language
English
Research Group
ImPhys/Charged Particle Optics
ISBN (print)
978-94-6186-782-7
Downloads counter
514
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