SOI digital accelerometer based on pull-in time configuration
Conference Paper
(2009)
Author(s)
L Pakula (TU Delft - Electronic Instrumentation)
V. Rajaraman (TU Delft - Electronic Instrumentation)
PJ French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:f2f01c7f-d36e-4a2e-8905-3a4b16361a9a
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Publication Year
2009
Research Group
Electronic Instrumentation
Pages (from-to)
1-4
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