Erosion rate change and surface roughening in Si during oblique O2+ bombardment with oxygen flooding
Conference Paper
(1998)
Author(s)
ZX Jiang (External organisation)
PFA Alkemade (TU Delft - Old - sect Electronic Materials (NS/EM))
Research Group
Old - sect Electronic Materials (NS/EM)
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https://resolver.tudelft.nl/uuid:f5e4426b-67a2-4bef-a2ec-d0f08b85616b
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Publication Year
1998
Research Group
Old - sect Electronic Materials (NS/EM)
Pages (from-to)
431-434
ISBN (print)
0471978264
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