Uniform photoresist coating of anisotropically etched cavities in silicon
Conference Paper
(1999)
Author(s)
VG Kiutchoukov (External organisation)
JR Mollinger (TU Delft - Electronic Instrumentation)
A Bossche (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:f69b0483-3ba6-4104-943b-4b33422d99f7
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Publication Year
1999
Research Group
Electronic Instrumentation
Pages (from-to)
697-700
ISBN (print)
90-73461-18-9
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