Integrating low-temperature carbon nanotubes as vertical interconnects in Si technology
Book Chapter
(2013)
Authors
S Vollebregt (TU Delft - Electronic Components, Technology and Materials)
R. Ishihara (TU Delft - Electronic Components, Technology and Materials)
J Derakhshandeh Kheljani (TU Delft - Electronic Components, Technology and Materials)
J. van der Cingel (TU Delft - Electronic Components, Technology and Materials)
C.I.M. Beenakker (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/f76550ab-33c2-4800-a744-4bbac07074af
More Info
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Publication Year
2013
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
423-436
ISBN (print)
9781466565234
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