Monolithic 3D-ICs with single grain Si thin film transistors
Journal Article
(2012)
Authors
R Ishihara (TU Delft - Electronic Components, Technology and Materials)
J Derakhshandeh Kheljani (TU Delft - Electronic Components, Technology and Materials)
M.R. Tajari Mofrad (TU Delft - Electronic Components, Technology and Materials)
T Chen (TU Delft - Electronic Components, Technology and Materials)
Negin Golshani (TU Delft - Electronic Components, Technology and Materials)
CIM Beenakker (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://doi.org/10.1016/j.sse.2011.10.025
TU Delft Repository resolver:
https://resolver.tudelft.nl/f7af3299-eb7e-4dc7-9a3d-6c19dc372e84
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Publication Year
2012
Language
English
Research Group
Electronic Components, Technology and Materials
Volume number
71
Pages (from-to)
80-87
DOI:
https://doi.org/10.1016/j.sse.2011.10.025
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