Person | TU Delft Repository

Monolithic, low-temperature fabrication of three-dimensional integrated circuits

Doctoral thesis - M.R. Tajari Mofrad

Simulation and Experimental study of crystallographic orientation control of 2D location controlled single grain crystalline silicon

Conference paper - M.R. Tajari Mofrad, R. Ishihara, J Derakhshandeh, A Baiano, J. van der Cingel, C.I.M. Beenakker

Fabrication of three-dimensional inverters using the ¿-czochralski

Conference paper - M.R. Tajari Mofrad, J. Derakhshandeh Kheljani, R. Ishihara, C.I.M. Beenakker

A study on CMP effect on the quality of thin silicon film characterized by micro czochraslki process with excimer-laser irradiation

Conference paper - J. Derakhshandeh Kheljani, M.R. Tajari Mofrad, R. Ishihara, J. van der Cingel, C.I.M. Beenakker

Excimer laser crystallization of thick a-Si for photodiode and solar cell applications

Poster - M.R. Tajari Mofrad, K Huet, C Boniface, R. Ishihara, J. Derakhshandeh Kheljani, J. van der Cingel, J Venturini, C.I.M. Beenakker

Stacking of Single-Grain Thin-Film Transistors

Journal article - M.R. Tajari Mofrad, J Derakhshandeh, R. Ishihara, A Baiano, J. van der Cingel, C.I.M. Beenakker

Monolithic 3D-ICs with single grain Si thin film transistors

Conference paper - R. Ishihara, N. Golshani, J Derakhshandeh, M.R. Tajari Mofrad, C.I.M. Beenakker

Integrated High Performance (100) and (110) Oriented Single-Grain Si TFTs without Seed Substrate

Conference paper - T Chen, R. Ishihara, J. van der Cingel, A Baiano, M.R. Tajari Mofrad, H. Schellevis, C.I.M. Beenakker

Monolithic 3D-ICs with single grain Si thin film transistors

Journal article - R. Ishihara, J. Derakhshandeh Kheljani, M.R. Tajari Mofrad, T Chen, N. Golshani, C.I.M. Beenakker

Thick single grain silicon formation with microsecond green laser crystallization

Journal article - A. Arslan, HJ Kahlert, P Oesterlin, M.R. Tajari Mofrad, R. Ishihara

High performance single-grain Ge TFTs without seed substrate

Conference paper - T Chen, R. Ishihara, M.R. Tajari Mofrad, S. Vollebregt, J. van der Cingel, M. van der Zwan, C.I.M. Beenakker

Single-grain germanium TFTs

Journal article - R. Ishihara, T Chen, A Baiano, M.R. Tajari Mofrad, C.I.M. Beenakker

Monolithic 3D integration of single-grain Si TFTs

Conference paper - M.R. Tajari Mofrad, R. Ishihara, J. Derakhshandeh Kheljani, A Baiano, J. van der Cingel, C.I.M. Beenakker

A three-dimensional phase-field simulation of pulsed laser induced epitaxial growth of silicon

Journal article - M.R. Tajari Mofrad, A.L. Magnay, R. Ishihara, H. Ming, C.I.M. Beenakker

Optimizing chemical mechanical polishing process in 3D-IC

Conference paper - J. Derakhshandeh Kheljani, M.R. Tajari Mofrad, R. Ishihara, C.I.M. Beenakker, J. van der Cingel

Monolithic three-dimensional stacking of integrated circuits with a low-temperature process

Conference paper - M.R. Tajari Mofrad, J. Derakhshandeh Kheljani, R. Ishihara, C.I.M. Beenakker

Analog and digital output lateral photodiodes fabricated by µ-Czochralski process at low temperature

Conference paper - J Derakhshandeh, M.R. Tajari Mofrad, R. Ishihara, C.I.M. Beenakker

Solar cells using lateral PIN photodiodes fabricated by low temperature single grain silicon

Poster - J. Derakhshandeh Kheljani, M.R. Tajari Mofrad, R. Ishihara, C.I.M. Beenakker

Single Grain Si TFTs for RF and 3D ICs

Conference paper - R. Ishihara, A Baiano, T Chen, J Derakhshandeh, M.R. Tajari Mofrad, M.M. Danesh, N. Saputra, J..R.. Long, C.I.M. Beenakker

A study of the CMP effect on the quality of thin silicon films crystallized by using the ¿-Czochralski process

Journal article - J Derakhshandeh, M.R. Tajari Mofrad, R. Ishihara, J. van der Cingel, C.I.M. Beenakker

M.R. Tajari Mofrad

Authored

Monolithic, low-temperature fabrication of three-dimensional integrated circuits

Simulation and Experimental study of crystallographic orientation control of 2D location controlled single grain crystalline silicon

Fabrication of three-dimensional inverters using the ¿-czochralski

A study on CMP effect on the quality of thin silicon film characterized by micro czochraslki process with excimer-laser irradiation

Excimer laser crystallization of thick a-Si for photodiode and solar cell applications

Stacking of Single-Grain Thin-Film Transistors

Monolithic 3D-ICs with single grain Si thin film transistors

Integrated High Performance (100) and (110) Oriented Single-Grain Si TFTs without Seed Substrate

Monolithic 3D-ICs with single grain Si thin film transistors

Thick single grain silicon formation with microsecond green laser crystallization

High performance single-grain Ge TFTs without seed substrate

Single-grain germanium TFTs

Monolithic 3D integration of single-grain Si TFTs

A three-dimensional phase-field simulation of pulsed laser induced epitaxial growth of silicon

Optimizing chemical mechanical polishing process in 3D-IC

Monolithic three-dimensional stacking of integrated circuits with a low-temperature process

Analog and digital output lateral photodiodes fabricated by µ-Czochralski process at low temperature

Solar cells using lateral PIN photodiodes fabricated by low temperature single grain silicon

Single Grain Si TFTs for RF and 3D ICs

A study of the CMP effect on the quality of thin silicon films crystallized by using the ¿-Czochralski process