24 records found
1
Monolithic 3D-ICs with single grain Si thin film transistors
Thick single grain silicon formation with microsecond green laser crystallization
Monolithic, low-temperature fabrication of three-dimensional integrated circuits
Monolithic 3-D integration of SRAM and image sensor using two layers of single-grain silicon
Single-grain germanium TFTs
Solar cells using lateral PIN photodiodes fabricated by low temperature single grain silicon
A three-dimensional phase-field simulation of pulsed laser induced epitaxial growth of silicon
High performance single-grain Ge TFTs without seed substrate
Excimer laser crystallization of thick a-Si for photodiode and solar cell applications
Location- and orientation-controlled, large single grain silicon induced by pulsed excimer laser crystallization
Stacking of Single-Grain Thin-Film Transistors
Simulation and Experimental study of crystallographic orientation control of 2D location controlled single grain crystalline silicon
Integrated High Performance (100) and (110) Oriented Single-Grain Si TFTs without Seed Substrate
A study of the CMP effect on the quality of thin silicon films crystallized by using the ¿-Czochralski process
Analog and digital output lateral photodiodes fabricated by µ-Czochralski process at low temperature
Single Grain Si TFTs for RF and 3D ICs
Monolithic 3D-ICs with Single Grain Si TFTs
Monolithic three-dimensional stacking of integrated circuits with a low-temperature process