A study of the CMP effect on the quality of thin silicon films crystallized by using the ¿-Czochralski process

Journal article (2009)

Authors

J Derakhshandeh External organisation

M.R. Tajari Mofrad Electronic Components, Technology and Materials -

R. Ishihara Electronic Components, Technology and Materials -

J. van der Cingel Electronic Components, Technology and Materials -

C.I.M. Beenakker Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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http://resolver.tudelft.nl/uuid:b5a4b2a3-327a-45ba-bcb1-ad1b12221c5f

Published Date

2009

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials