AA
Aslihan Arslan
7 records found
1
Authored
This paper presents a new method for the CMOS compatible fabrication of microchannels integrated into a silicon substrate. In a single-step DRIE process (Deep Reactive Ion Etching) a network of microchannels with High Aspect Ratio (HAR) up to 10, can be etched in a silicon substr
...
Microfluidics has been identified as a revolutionizing technology for chemistry and biology, enabling cost-effective semi-automated experiments without extensive laboratory infrastructure. However, the complexity and number of simultaneous experiments is limited with current fabr
...